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PRODUCTS
Youibot ATS20 is a fully automated lot box transfer robot built for semiconductor logistics, enabling safe and efficient wafer box circulation..
➢ 20 storage slots with RFID sensors provide real-time monitoring and reliable transfer.
➢ Laser-SLAM fusion navigation ensures ±10 mm positioning accuracy.
➢ 150 Ah battery supports 10+ hours of continuous operation under full load.
➢ Dual LiDARs, 3D camera, pit sensors, and 360° bumpers deliver multi-level safety protection.
Specific Load
Run Time
L1940*W528*H1765mm
360° full protection
ATS 12-FFU is a fully automated industrial robot specifically designed for SMIF POD handling in the semiconductor industry, integrating superior intelligent navigation, safety performance, and high cleanliness control capabilities to provide efficient and stable solutions for wafer transfer across differenEfficiently navigates dynamic environment cleanroom classification zones.
➢ Ultra-Clean Inter-Zone Transfer
➢ Intelligent Storage & Safety Protection
➢ Flexible Deployment & Multi-robot Collaboration
➢ High-precision Fusion Navigation
Specific Load
4h
L1384*W500*H1420mm
360° full protection
The ATS series lot box transfer robots—including ATS20, ATS12-FFU, and multiple other models—are developed by Youibot to automate semiconductor material transport across the entire manufacturing flow, from wafer fabrication to packaging and testing. Designed for high-throughput circulation of FOUPs, FOSBs, lot boxes, and other carriers, the series ensures efficient, precise, and contamination-free transfer in cleanroom environments. By working in tandem with the OW series mobile manipulators, the ATS robots form the backbone of a fully automated semiconductor factory, delivering seamless pickup, buffering, and distribution for diverse workflows.
Powered by laser-SLAM fusion navigation, the ATS series achieves ±10 mm positioning accuracy for stable transport between tools and storage systems. Engineered for semiconductor standards, vibration is controlled at ≤0.3G on flat ground to protect sensitive materials during handling. Equipped with dual LiDARs, 3D cameras, pit sensors, 360° bumpers, and emergency stop mechanisms, the robots provide comprehensive environmental perception and safety protection. Advanced RFID-based monitoring ensures real-time tracking of lot box status, while safety light curtains and multi-sensor redundancy safeguard both operators and materials.
The ATS series is fully compatible with YOUIFLEET—Youibot’s intelligent fleet management system—for large-scale dispatching, multi-robot collaboration, and integration with factory automation software. Featuring long-life batteries and support for both manual and automatic charging, ATS robots ensure uninterrupted operation for high-volume fabs. With scalable configurations and seamless interfacing with OW series manipulators and process equipment, the ATS series enables true end-to-end automation, boosting logistics efficiency and unlocking fully automated semiconductor manufacturing.
The ATS series lot box transfer robots—including ATS20, ATS12-FFU, and multiple other models—are developed by Youibot to automate semiconductor material transport across the entire manufacturing flow, from wafer fabrication to packaging and testing. Designed for high-throughput circulation of FOUPs, FOSBs, lot boxes, and other carriers, the series ensures efficient, precise, and contamination-free transfer in cleanroom environments. By working in tandem with the OW series mobile manipulators, the ATS robots form the backbone of a fully automated semiconductor factory, delivering seamless pickup, buffering, and distribution for diverse workflows.
Powered by laser-SLAM fusion navigation, the ATS series achieves ±10 mm positioning accuracy for stable transport between tools and storage systems. Engineered for semiconductor standards, vibration is controlled at ≤0.3G on flat ground to protect sensitive materials during handling. Equipped with dual LiDARs, 3D cameras, pit sensors, 360° bumpers, and emergency stop mechanisms, the robots provide comprehensive environmental perception and safety protection. Advanced RFID-based monitoring ensures real-time tracking of lot box status, while safety light curtains and multi-sensor redundancy safeguard both operators and materials.
The ATS series is fully compatible with YOUIFLEET—Youibot’s intelligent fleet management system—for large-scale dispatching, multi-robot collaboration, and integration with factory automation software. Featuring long-life batteries and support for both manual and automatic charging, ATS robots ensure uninterrupted operation for high-volume fabs. With scalable configurations and seamless interfacing with OW series manipulators and process equipment, the ATS series enables true end-to-end automation, boosting logistics efficiency and unlocking fully automated semiconductor manufacturing.
The ATS series of Wafer box transfer robots are built for high-volume and efficient logistics in semiconductor factories. With multi-slot storage and RFID monitoring, they enable batch transfer of FOUPs, FOSBs, and lot boxes with full traceability. Supporting cross-cleanroom operation and ensuring ≤0.3G low-vibration transport, the ATS series reduces manual handling risks and enhances overall production efficiency.
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