Robot Operation Series

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OW12

OWC

Operation Series - OW12

Youibot OW12 is a industrial mobile manipulator robot designed for loading andtransferring 12" Foup pods, which is helpful for semiconductor manufacturingautomation.
➢ High-performance mobile laser navigation chassis is paired with a flexiblecobot.
➢ LiDAR for horizontal and vertical safety detection enhances productiorenvironment safety.
➢ Meets semiconductor industry requirements with cleanliness up to Class100.

Specific Load

12" Foup Pod

Run Time

8 h

Size

1085x775x1510mm

Safety Protection

Horizontal & VerticalDetection

Product Manual Download Inquiry

Operation Series - OWC

OWC is an Open Cassette automated transport robot purpose-built for semiconductor fabs. It delivers efficient, precise, and flexible transfer solutions for Open CST, seamlessly handling multi-point and multi-process material flows throughout production.
➢ Omnidirectional Chassis, Ultimate Flexibility.
➢ Safety & Intelligent Scheduling.
➢ Stable And Reliable, Operating 24/7.
➢ Agile Handling, Efficient Docking.

Open Cassette

Specific Load

Run Time

Open Cassette

8 h

Size

1070*665*1100mm

Safety Protection

Horizontal & Vertical Detection

Product Manual Download inquiry

Description

Specialized for Semiconductor Full-Process Material Handling

The OW series industrial mobile manipulator robots—including OW12, OW8, OWC, and multiple other models—are designed by Youibot for fully automated handling of diverse materials throughout the entire semiconductor manufacturing process. These materials include 12" and 8" FOUP PODs, SMIF PODs, Open CSTs, and Magazins. Equipped with a flexible cobot, an end gripper, and vision sensors, the robots accurately grasp materials at upper clamping fixtures, minimizing direct wafer contact and reducing vibration during transfer. The series ensures vibration remains below ≤0.5G on flat ground, meeting stringent industry standards. In addition to electronic shelves, the OW robots seamlessly interface with Youibot ATS series (wafer transfer bus) and process equipment to achieve fully automated material pickup and stable transport. They provide an ideal automation solution for end-to-end semiconductor material flow, significantly enhancing operational consistency and efficiency.

Multidirectional Radar Detection Ensures Safety During Operation

TThe OW series integrates a high-performance autonomous mobile chassis with multiple sensors and HMI, offering exceptional flexibility and safety for semiconductor environments. In addition to 360° horizontal LiDAR for navigation and obstacle avoidance, select models feature vertical LiDARs that scan at the height of the load, preventing collisions with obstacles at the same level during movement. This multi-layered sensing approach ensures both personnel safety and material integrity throughout operation.

Flexible Deployment for Quick Start-Up

The OW series is equipped with MOS—an integrated cobot control system developed by YOUIBOT that seamlessly merges the cobot’s upper control with multiple end-effector sensors into one unified operating system. This greatly reduces integration complexity and shortens deployment time across multi-system environments. With streamlined workflows and comprehensive log recording, the OW robots ensure full traceability of operations, providing a reliable and efficient automation foundation for diverse semiconductor applications.

Planar and vertical safety scanning providing reliability in semiconductor scenario operation;
Self-developed cobot and end control integration system MOS;
Storage level monitoring function provided by specially designed electronic material rack;
HMI interface on the integrated box structure for real-time operator inspection;
Contribute to Industry 4.0 automation transformation in the semiconductor industry.

Description

Specialized for Semiconductor Full-Process Material Handling

Multidirectional Radar Detection Ensures Safety During Operation

Flexible Deployment for Quick Start-Up

Planar and vertical safety scanning providing reliability in semiconductor scenario operation;
Self-developed cobot and end control integration system MOS;
Storage level monitoring function provided by specially designed electronic material rack;
HMI interface on the integrated box structure for real-time operator inspection;
Contribute to Industry 4.0 automation transformation in the semiconductor industry.

Application Scenario

The OW series of industrial mobile manipulation robots are custom designed for wafer handling scenarios in the semiconductor industry. Featuring integrated robotic arms, end clamps, and sensors, they provide stable and precise gripping of FOUP PODs, enabling them to be accurately placed on the body storage position. To further reduce the cost of production errors, specially designed electronic shelves equipped with sensors ensure FOUP POD traceability. With the OW series, unnecessary production errors can be avoided, resulting in a more cost-effective and efficient semiconductor manufacturing process.