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OW12

Operation Series - OW12

The automation of semiconductor production is aided by the mobile manipulator that is designed for loading and transferring 12'' Foup Pods.
➢ High-performance mobile laser navigation chassis is paired with a flexible cobot
➢ LiDAR for horizontal and vertical safety detection enhances production environment safety.
➢ Meets semiconductor industry requirements with cleanliness up to Class100.

Specific Load

12'' Foup Pod

Run Time

8 h

Size

1085x775x1510mm

Safety Protection

Horizontal & Vertical Detection

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Description

Specialized for semiconductor scene, transporting FOUP POD

The OW12 comes with a cobot that's designed to handle and load/unload 12" FOUP PODs in semiconductor front-end chip manufacturing scenarios. The cobot has an end gripper and vision sensor that can accurately grasp the 12" FOUP POD at the upper clamping fixture, reducing direct contact with wafers and minimizing vibration impact during lifting. The robot is designed to minimize vibration impact on the handling object FOUP POD, meeting the conventional standard of vibration ≤ 0.5G for flat ground operation. With the specially designed electronic shelf, it can handle material from the robot storage position to the shelf storage position while monitoring and uploading the robot and shelf storage position information.

Multidirectional radar detection ensures safety during operation

The OW12 is a mobile manipulator composed of a P200 base chassis integrated with multiple sensors and HMI. In addition to the P200's 360° plane scanning for obstacle detection and navigation, the upper integrated box structure of the OW12 is equipped with two additional lidars for vertical plane scanning. This feature prevents the risk of material damage due to obstacles of the same height touching the OW12's storage position during operation.

Flexible deployment for quick start-up

Equipped with MOS - an integrated cobot control system developed by YOUIBOT that seamlessly integrates the upper system of the cobot and multiple end sensing control systems into Ow12 internal operating system. This integration significantly reduces the cost and time associated with switching between multiple systems during deployment. With a more convenient workflow and log record for the entire machine control system, OW12 ensures action traceability during its operation, making it a reliable and efficient choice for various industries.

Planar and vertical safety scanning providing reliability in semiconductor scenario operation;
Self-developed cobot and end control integration system MOS;
Storage level monitoring function provided by specially designed electronic material rack;
HMI interface on the integrated box structure for real-time operator inspection;
Contribute to Industry 4.0 automation transformation in the semiconductor industry.

Application Scenario

The OW series of collaborative robots are custom designed for wafer handling scenarios in the semiconductor industry. Featuring integrated robotic arms, end clamps, and sensors, they provide stable and precise gripping of FOUP PODs, enabling them to be accurately placed on the body storage position. To further reduce the cost of production errors, specially designed electronic shelves equipped with sensors ensure FOUP POD traceability. With the OW series, unnecessary production errors can be avoided, resulting in a more cost-effective and efficient semiconductor manufacturing process.